Ruthenium(II) MOCVD Precursors for Phosphorus‐Doped Ruthenium Layer Formation
نویسندگان
چکیده
منابع مشابه
Mechanism-Based Design of Precursors for MOCVD
A chemistry-based approach to designing precursors for the deposition of inorganic films requires consideration of the physical properties of the precursor compound (e.g., volatility for transport in the reactor) and its probable decomposition pathways, both in the gas phase and on the surface during growth. We have been using Aerosol-Assisted Chemical Vapor Deposition of tungsten carbonitride ...
متن کاملAtomic Layer-by-Layer MOCVD of Oxide Superconductors
A very smooth surface film of c-axis oriented Y B a z C w G (YBCO) with roughness of less than monomolecular layer over lOpmxlO~rn, free of precipitates, has been obtained by atomic layer-by-layer metalorganic chemical vapor deposition (MOCVD) on a SrTi03 substrate at 650°C. A very large terrace length of 0.3-0.5pm may be due to the enhanced migration of growing species on the surface. The resu...
متن کاملMixed amido/imido/guanidinato complexes of niobium: potential precursors for MOCVD of niobium nitride thin films.
Novel mixed amido/imido/guanidinato complexes of niobium are reported. The complexes were synthesized by insertion of two equivalents of di-isopropylcarbodiimide (i-Pr-cdi) or bis-cyclohexylcarbodiimide (Cy-cdi) respectively, into the niobium-amido bonds of [Nb(NR(2))(3)(N-t-Bu)] (, R = Me; , R = Et) starting out from [NbCl(3)(N-t-Bu)(py)(2)] and the respective LiNR(2) reagent (py = pyridine). ...
متن کاملRare earth β-diketonate and carboxylate metal complexes as precursors for MOCVD of oxide films
Volatile and thermostable complexs of lanthanide acetylacetonates and pivalates were obtained and investigated by different methods. These compounds were used for lanthanide oxide containing film producing and for fabrication of silica optical fibers doped by lanthanide oxide. The properties of these and already known volatile precursors are compared. It is well recognized that rare earth conta...
متن کاملFormation of precursors for essential glycosylation-reactions
English) 4 Abstrakt (Svenska) 5
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: European Journal of Inorganic Chemistry
سال: 2020
ISSN: 1434-1948,1099-0682
DOI: 10.1002/ejic.201901310